Titanium nitride films native to a commercial complementary metal–oxide–semiconductor (CMOS) process can become high-impedance superconductors at millikelvin temperatures, providing compact, sensitive readout of semiconductor spin qubits from within a chip’s existing gate metallization.
This is a preview of subscription content, access via your institution
Access options
Access Nature and 54 other Nature Portfolio journals
Get Nature+, our best-value online-access subscription
Learn more
Subscribe to this journal
Receive 12 digital issues and online access to articles
Learn more
Rent or buy this article
Prices vary by article type
Learn more
Prices may be subject to local taxes which are calculated during checkout
References
Swift, T. H. et al. Nat. Electron.
https://doi.org/10.1038/s41928-026-01728-8(2026).Burkard, G., Ladd, T. D., Pan, A., Nichol, J. M. & Petta, J. R. Rev. Mod. Phys. 95, 025003 (2023).
Keith, D. et al. Phys. Rev. X 9, 041003 (2019).
Ulbricht, G., De Lucia, M. & Baldwin, E. Appl. Sci. 11, 2671 (2021).
Members of the HRL Quantum Team and Collaborators. Nature 655, 1154–1159 (2026).
Medahinne, M. et al. Phys. Rev. Appl. 23, 014070 (2025).
Author information
Authors ...